NXQ4000 Series – R&D & pilot line production

The NXQ4000 Series Mask Aligner is ideal for universities and pilot line production, supporting substrate sizes from pieces up to 200 mm and an easy to use interface with simple, top side mask loading. The NXQ4000 Series Semi-Automatic Mask Aligner combines innovative design with precision alignment and exposure features. The automatic sequencing makes the system very easy to learn and use and is well suited for multi-user labs. The extreme reliablity, low cost of ownership and versatility of the NXQ4000 has made it the choice of manufacturing facilities, R&D Centers and university programs around the world, for a wide range of technologies.

The NXQ4000 Series Mask Aligner is ideal for Microelectronics, LED / HB LED, 3D IC, SIOP, WLP, 2.5D Interposer, MEMS, Bio MEMS, Micro Fluidics, Compound Semi, Solar (HCPV), and Optoelectronics applications.

Standard Features

· Substrate sizes from pieces to 200mm (8”) diameter

· Video View Microscope with High Definition Cameras and Dual HD Monitors. Splitfield/ singlefield alignment, Infinity Corrected 5x Objectives, 7x Optical Zoom (select desired field of view and magnification). Optional Objectives – 2x, 7.5x, 10x or 20x

· Through Objective LED Illumination

· Low Diffraction, High Resolution Printing Optics

· Soft/Hard Pressure Contact. Vacuum Contact and Manual Proximity exposure modes

· Manual X-Y joystick and micrometer theta alignment stage. X-Y Micrometers optional

· Z Axis – Frictionless air bearing – highly reliable and maintenance free

· Easy manual tray-load for substrate loading / unloading

· Automatic Wedge Error Compensation and movement to Align Gap after loading wafer

· Topside mask loading

· UltraSense constant power or constant intensity UV power supply

· Vibration Isolation table included as standard

· Very intuitive and easy operation, well suited for multi-user labs

· Extremely reliable, low maintenance and low cost of ownership

· Pulsed exposure timer sequencing