|
PDC Plasma Cleaner BENCHTOP PLASMA CLEANERS Harrick Plasma cleaners are benchtop, inductively coupled plasma devices that serve as excellent tools for surface cleaning, surface preparation, and surface modification. Plasma treatment may be applied to a wide variety of materials,including metals, ceramics, composites, plastics, polymers and biomaterials. Our plasma cleaners may be employed in a broad range of surface engineering applications,including surface cleaning, surface sterilization, surface activation, surface energy alteration, surface preparation for bonding and adhesion, modification of surface chemistry, as well as the surface treatment of polymers and biomaterials through activation, grafting and surface coating. Our products are specifically designed for laboratory and R&D use. They offer inexpensive,compact functionality. Key applications areas include materials science,microfluidics, polymer science, biomedical materials, optics, and sterilization of dental and medical implants and instruments.▶ PRODUCTSBASIC PLASMA CLEANERPDC-32G (115V) | PDC-32G-2 (230V)A compact,inexpensive benchtop plasma instrument suitable for nanoscale surface cleaningand activation of small samples.EXPANDED PLASMA CLEANERPDC-001 (115V) | PDC-002 (230V)A larger tabletop plasma instrument and extensively used for nanoscale surface cleaning and surface activation.HIGH POWER EXPANDED PLASMA CLEANERPDC-001-HP (115V) | PDC-002-HP (230V)With twice the cleaning rate as the Expanded Plasma Cleaner, the High Power Expanded model is a versatile instrument.▶ APPLICATIONSNANOSCALE CLEANINGPlasma surface treatment removes nanoscale organic contamination and alters surface chemistry without affecting the bulk material.ALTER SURFACE CHEMISTRYTailoring surfaces with specific chemical functionalities is often vital for optimal material performance. Plasma can alter surfaces to be more hydrophilic or hydrophobic or to introduce specific chemical functionalities to the surface without affecting the bulk material.DEVICE FABRICATIONPlasma enables the fabrication of devices through covalent bonding (microfludic devices) or by facilitating the adhesive potential of intermediate epoxys, glues or other adhesives.BIOLOGY & BIOMEDICALPlasma treatment cleans, sterilizes and activates biomaterial surfaces, improving biocompatability and antibiofouling traits. As a result, plasma is used extensively for cell seeding, protein adsorption, biomaterial coating, and implant surface activation.SURFACE PATTERNINGPlasma can be employed in various ways to facilitate surface patterning, which is often a required processing step for the fabrication of multilayer devices, such as solar cells, sensors, and microfluidic chips. Plasma Etch & Deposition PlasmaStar 100/200A Unique Modular Approach to Barrel Plasma Processing The PlasmaSTAR® Series of Plasma Processing Systems from Axic, Inc. defines a new concept in barrel plasma processing. The systems are based on a modular design concept. Starting with a universal base unit, multiple electrode modules are available for easy insertion into the base unit. You will find the ease of use, variety of plasma processes, serviceability and attractive pricing unsurpassed by any other plasma. - Interchangeable Electrode Modules- A Multiple Electrode Configurations: Cage, Tray, RIE, Downstream- Proven Process Recipes- Field Proven Components- End-Point Detection (optional)- Auto RF Matching- Downstream Pressure Control (optional)- Computer Controlled- Touch Screen Operation- Multiple Pumping Options System DescriptionIn the research, process development and production of plasma processing, the need for a highly versatile and reliable tool is always in considerable demand. With the ever changing requirements in plasma research, the system selected must he capable of offering the widest range of process parameters, highest degree of repeatability for verifying the process and easily modified for new process requirements. The PlasmaSTAR® series of dry process systems will satisfy the demanding requirements necessary to perform these tasks. The PlasmaSTAR® is a plasma tool used in research, process development and volume production for photo-resist striping and descuming, isotropic and an isotropic etching, organic ashing, hybrid circuit cleaning, printed circuit board desmearing, failure analysis, surface treatment and modification of plastics, polymer deposition, and a wide range of other plasma applications. The PlasmaSTAR® product line offers a uniquely new modular approach to barrel plasma systems. The PlasmaSTAR® will accommodate the processing of 200 mm or smaller substrates. (For single wafer RIE processing of 300 mm wafers) The selection of proven, quality components, modular sub assemblies, versatile chamber-electrode design, compact size, automation and field proven process recipes will make the PlasmaSTAR® the "system of choice" for plasma process engineers. ApplicationsWith the PlasmaSTAR®’s wide selection of chamber and electrode configurations the system is capable of satisfying a wide range of plasma processing conditions. These processes range from simple surface cleaning to sophisticated submicron RIE etching. Axic, Inc., in conjunction with our large customer b ase has developed proven process recipes guaranteeing your system is up and processing from the day you install the system. Only the highest quality sub components are used in the manufacturing of the PlasmaSTAR® system providing the highest up-time, reliability, repeatability and serviceability.Typical processes include: - Plasma Descuming- Photo-Resist Stripping- Surface Treatment- Anisotropic & Isotropic Etching- Failure Analysis Applications- Material Modification- Package Cleaning- Passivation Etching- Polyimide Etching- Adhesion Promotion- Biomedical Applications- Polymerizaton- Hybrid Cleaning- Pre-Bond Cleaning Tergeo Plasma Cleaner Tergeo tabletop plasma cleanersTabletop & remote plasma cleaners for sample cleaning, surface treatment & activation, photresist ashing Sample cleaning & etchingSurface wettability modificationPromote bondability & adhesion Generate oxygen, argon, nitrogen, hydrogen, and ambient air plasma to ash photoresist, descum after patterning, remove hydrocarbon and other types of surface organic coatings or contaminations, change surface energy and improve the bonding strength. Tergeo series plasma systems are laboratory tabletop plasma system. The maximum chamber diameter is 160mm (6.3 inch). Here are some typical applications: • Integrated circuit chip cleaning before wire bonding and packaging• TEM and SEM sample cleaning for hydrocarbon contamination removal• Plasma treatment for hydrophilic or hydrophobic surface wettability• Surface preparation to improve epoxy/glue bonding strength• Glass and optical fiber heads cleaning for optics, laser and communication• Improve wettability for MEMS microfluidics devices.• Photoresist ashing and descum after patterning• Device decapsulation for failure analysis.• Contact lens, medical implant and other type medical device surface treatment and activation Tabletop plasma cleaners model:▶ Tergeo Automatic tabletop plasma cleaner for research laboratories and low volume production ▶ Tergeo-plus Large chamber tabletop plasma cleaner for R&D, low to mid volume production ▶ Tergeo-EM Tabletop plasma cleaner for SEM/TEM sample cleaning |