FR-Education

Introduction

FR-Education is a low-cost table-top solution for typical optical measurements (Absorbance/Transmittance, Reflectance, Fluorescence) and non destructive measurement of Film thickness and optical properties (n & k) of thin and thick single film or multilayer stacks. Film thickness and optical properties measurement, is based on White Light Reflectance Spectroscopy (WLRS). In WLRS, the reflectance spectrum in the 350-100nm range due to the interferences at the interfaces of the film(s) is collected with the embedded spectrometer and then fitted with the multi-layer reflectance equation to derive the thickness, the refractive index and roughness of the film(s).

FR-Education tool is controlled through FR-Monitor™ performing the spectral data acquisition and analysis. A material database is included and can be easily expanded by the user. The entire system (hardware – software) is shipped ready for measurements. The only additional part needed is a PC with a free USB port. The system can be easily used by anyone with basic computer skills without any deep knowledge of optics.

The FR-Education tool can handle layer stacks consisted of numerous layers and two quantities can be calculated simultaneously e.g. thicknesses of two films, thickness and n & k of one film.

FR-Education is a simplified version of FR-Basic with case Type A (please refer to FR-Basic section), without cover top. In this configuration the spectrometer has 650 pixels, and thus the film thickness range can be measured is limited. FR-Education comes with a Reflection Probe, two (2) fibers, and a film/cuvette holder for Absorbance/Transmittance measurements in standard 25px cuvettes and films.

A special holder accommodating two reference samples (silicon and aluminum) and Si wafer pieces with various films (SiO2, Si3N4/SiO2, poly-Si/Si3N4/SiO2) is provided as a reference, while optical absorbance standards can be provided on request.

Specifications