EZI – UV NIL Tool

EZImprinting is a super-high yield (> 99 %) nanoimprint lithography platform with sub-10 nm resolution and one-step Auto Release™ function.

Advantages of the PL400/600 Nanoimprint Systems:

- Full-wafer imprinting – 6 inch PL600, 4 inch PL400

- Sub-10 nm resolution with 99% yield

- One step auto-release function preventing mold/substrate damage

- Supports both hard and soft molds of various types

- Variable mold and substrate sizes

- Programmable PLC with touch-screen user interface

- Alignment options