SPIN COATER
UNIXX S760+
(21x21 inch) Stand-alone system
spin coater for large substrates.
UNIXX SA30+
(Ø300mm) Stand-alone system with
covered chuck spin coater. (single base frame)
UNIXX SHp22+
(Ø200mm) Stand-alone system with
covered chuck spin coater & hotplate module.
UNIXX SA30
(Ø300mm) Stand-alone system with
open bowl spin coater. (single base frame)
UNIXX SHe22
(Ø200mm) Stand-alone system with
open bowl spin coater & hotplate module.
